JPH057240Y2 - - Google Patents

Info

Publication number
JPH057240Y2
JPH057240Y2 JP1987099171U JP9917187U JPH057240Y2 JP H057240 Y2 JPH057240 Y2 JP H057240Y2 JP 1987099171 U JP1987099171 U JP 1987099171U JP 9917187 U JP9917187 U JP 9917187U JP H057240 Y2 JPH057240 Y2 JP H057240Y2
Authority
JP
Japan
Prior art keywords
holder
boat
quartz
reaction tube
support rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987099171U
Other languages
English (en)
Japanese (ja)
Other versions
JPS647263U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987099171U priority Critical patent/JPH057240Y2/ja
Publication of JPS647263U publication Critical patent/JPS647263U/ja
Application granted granted Critical
Publication of JPH057240Y2 publication Critical patent/JPH057240Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1987099171U 1987-06-26 1987-06-26 Expired - Lifetime JPH057240Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (en]) 1987-06-26 1987-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987099171U JPH057240Y2 (en]) 1987-06-26 1987-06-26

Publications (2)

Publication Number Publication Date
JPS647263U JPS647263U (en]) 1989-01-17
JPH057240Y2 true JPH057240Y2 (en]) 1993-02-24

Family

ID=31326079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987099171U Expired - Lifetime JPH057240Y2 (en]) 1987-06-26 1987-06-26

Country Status (1)

Country Link
JP (1) JPH057240Y2 (en])

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107843A (ja) * 1983-11-16 1985-06-13 Tekunisuko:Kk 組立式支持具
JPS61247048A (ja) * 1985-04-24 1986-11-04 Nec Corp 縦型拡散炉用ボ−ト
JPS6299476A (ja) * 1985-10-28 1987-05-08 Agency Of Ind Science & Technol プラズマｃｖｄ装置の放電電極

Also Published As

Publication number Publication date
JPS647263U (en]) 1989-01-17

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